Used GATAN 697 #9202471 for sale
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ID: 9202471
Precision ion polishing system
Ilion II system
Broad beam argon milling system
Whisperlok system: Ability to load / Unload samples
Milling angle: +/- 10 degrees
Milling rate on silicon at 8.0kV: 300um/hr
Low energy focusing penning ion guns
Variable energy: 0.1 to 8.0kV
Ion source:
Ion guns: Two penning with rare earth magnets
Milling angle: +10 to -10°
Ion beam energy: 0.1 - 8.0kV
Ion current density peak: 10(A/cm²)
Beam diameter: Adjustable using gas flow controller / Discharge voltage
Specimen stage:
Mounting: i=Ilion patented blaae
Rotation: 0.5-6.0 RPM
Beam modulation: Single / Double with adjustable range / No modulation
Vacuum:
Dry pumping system: Two stages diaphragm pump backing a 80L/s turbo drag pump
Pressure (torr):
Base: 5 x 10^-6
Operating: 8 x 10^-5
Vacuum gauge: Cold cathode type
Specimen airlock: Whisperlok, specimen exchange time <1 min
User interface:
10" Color touch screen: Simple operation with complete control / Recipe operation
Options:
Certain llion+ II models includes
Llion+ II digital zoom microscope:
Microscope assembly
Digital camera with USB cable / Trigger cable
Imaging PC
Ethernet cable
USB Cable connected to the camera
Power consumption (W):
During operation: 200
Guns off: 100
Argon gas: 25 psi
Power requirements: 100/240 VAC, 50/60 Hz
Manuals included.
GATAN 697 is an ion milling equipment developed by GATAN Company. This system is designed to machine micron-scale features in a variety of substrates including semiconductors, metals, ceramics, and polymers. It uses high-energy ion beams to mill away material from the substrate in a precise, controlled manner. 697 utilizes a high-flux ion source, collimation unit, beam blanking machine, and ion extraction lens to generate a focused, high-energy ion beam. The ion beam is then directed onto the surface of the substrate to produce a variety of processes such as etching, ablation, sputtering, or deposition. The ion beam can be accurately programmed to mill micro-scale features and structures in the substrate. GATAN 697 is controlled by a unique software package called GATAN Control. This software allows users to program the tool to ion mill any substrate at any desired angle or pattern. It provides accurate and repeatable machining of complex structures and shapes by allowing for precise control of the ion beam. 697 is designed with robust safety measures. These features include an automatic shut-off asset that will activate when the ion beam rises to a dangerous level, as well as automatic shut-off due to mechanical failure. GATAN 697 is ideal for micron-scale machining of substrates for research and production applications. It provides high precision, repeatable results with minimal wear and tear on the ion source and components. This model is reliable and economical way to produce micron-scale features in a variety of substrates.
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