Used CYMER EX 4000A #9015366 for sale

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Manufacturer
CYMER
Model
EX 4000A
ID: 9015366
Ultraviolet laser system Argon fluoride laser source Maximum average power: 50 W Maximum pulse energy: 0.5 Joules Pulse duration: 0-50 nSec Wavelength: 193 nm Includes: (2) General comm ports (2) Paddle ports Stepper I/O RS-232 ports Synchronizer Trigger External monitoring connections.
CYMER EX 4000A is a pulsed excimer laser designed for modern semiconductor fabrication processes. This high-performance laser delivers deep ultraviolet (DUV) radiation at a wavelength of 248nm. It is capable of performing ablation, lithography, and cleaning operations, and is an essential component in photolithography processes such as etching, marking, and cutting. The equipment is powered by a low-voltage, highly efficient pulse module to deliver up to 61 Joules of energy per square centimeter. This high power output allows high energy photodissociation and subsequent ablation thus, providing excellent process results. The exceptional beam profile and pulse-to-pulse energy stability enable stable, uniform ablation performance for exceptionally precise results. The uniformity of the beam is higher than 80 percent with a refractive index of less than 1.4 and a divergence of less than 4 mrad. The system also includes an internal and external shutter enabling shutterless operation. The unit includes an integrated helium-neon laser interferometer which provides closed-loop interferometric control to ensure accurate pulse-to-pulse repeatability. This provides precision in ablation operations. The low-noise generator further helps reduce interference and unwanted ambiguity for clear readings in short integration times. The machine also includes a variety of interface options such as a 488-nm USB, a 9-pin RS-232 serial port, and an EtherCAT EtherNet/IPTM interface for modernized inputs. The high reliability and robustness of EX 4000A enable efficient field operation for a long period of time. A variety of on-site spares and accessories are also available to enhance the tool's performance. The asset includes a user-friendly interface which makes the setup and operation straightforward and hassle-free. Further, the unit can be serviced remotely with the help of the service platform. Overall, CYMER EX 4000A laser is an advanced laser model designed specifically for modern semiconductor fabrication processes. It offers robust performance, reliable operation, and exceptional beam quality for highly accurate operations. The wide range of interface options ensures easy operation and maintenance while the user-friendly interface promotes easy setup and operation.
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