Used CYMER XLA 140 #9296982 for sale

CYMER XLA 140
Manufacturer
CYMER
Model
XLA 140
ID: 9296982
Vintage: 2003
System 2003 vintage.
CYMER XLA 140 is a light source used in the lithography process for semiconductor manufacturing. It is capable of producing powerful laser pulses up to 140 mJ at 40 Hz, which make it ideal for use in advanced microfabrication applications. CYMER XLA140 is a solid-state, hybrid, excimer style laser, with a unique optical design that combines Nd:YAG and KrF active media. The system is designed with an easy to operate, highly flexible, user friendly architecture, and its maximum pulse energy can be adjusted to suit specific application requirements. The pulse energy control range is 5 - 140 mJ, with sub-picosecond durations and pulse-to-pulse stability to within 5%. The system also features a high resolution spatial amplitude filter and an advanced power supply design that provides pulse triggering with zero jitter. XLA-140 is designed to support mid-to-low power lithography needs. It has an integrated high-precision water-cooled beam line that is designed for efficient and low risk pre- and post-conditioning of radiation beam parameters. This ensures consistent beam quality and reduces operating costs, as well as the potential for thermal loading. The laser operates from a single excimer laser, with a total energized power of 4 kW, at an output power of up to 50,000 W/cm2 pulse intensity. The power requirements are easily met through a standard 208 VAC, 20 amp input. XLA140 also has a compact footprint, with dimensions of 13.9"(H) x 40.7" (W) x 52" (L). It is capable of both normal and inverted orientation mounting, and features a high level of vibration isolation. With its ease of installation, advanced features, and low cost of ownership, CYMER XLA-140 is an ideal choice for a wide variety of precision microfabrication needs.
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