Used TRIKON / ELECTROTECH ND-6210 for sale
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TRIKON / ELECTROTECH
ND-6210
PECVD System, 6" Process: SiN-SiC (Sio2) Gases: CF4, O2, N2, N2O, SiH4, NH3, SiH4/Ar-5%, CH4 Manuals
49
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