Used CANON PLA 501 FA #9270090 for sale

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Manufacturer
CANON
Model
PLA 501 FA
ID: 9270090
Wafer Size: 4"
Mask aligner, 4" Automatic wafer handling Round chuck.
CANON PLA 501 FA is an automated mask aligner for precision photolithography and wafer-level packaging. The equipment is fully computer-controlled, allowing the user to set up, monitor and adjust parameters from a central control unit. The system includes advanced features for both UV-exposure and wafer-level packaging. CANON PLA-501FA is a 5-axis alignment tool designed to enable ultra-precise alignment of photomasks to substrates. The unit includes a x-y rotation stage with center poke correction and a z-axis stage to control the substrate height. Additionally, a cat's eye camera is used to detect the alignment of the substrate to the mask. PLA 501FA is capable of delivering high accuracy and repeatability for alignment of photomasks and substrates. CANON PLA-501 FA boasts of two exposure modes, namely, flipping and double exposure mode. Utilizing a flip-able polarization state of the light source, both the front side and the back side of the substrate can be simultaneously exposed. This aids in optimizing the throughput while minimizing any distortion caused from the light source. Further, PLA-501 FA offers a suite of advanced capabilities for wafer-level packaging applications. The machine's low-temperature bonding option is ideal for bonding delicate chips. The tool also utilizes advanced encapsulation techniques to protect assemblies from moisture and dust. Additionally, PLA 501 FA includes marker detection with PID (position indication detector) to ensure the accuracy of the assembly. Overall, PLA-501FA is an advanced mask aligner which offers excellent performance in precision photolithography and wafer-level packaging. The asset is capable of delivering consistently reliable results with its multitude of advanced features and capabilities.
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