Used CANON PLA 600 FA #9393290 for sale

Manufacturer
CANON
Model
PLA 600 FA
ID: 9393290
Wafer Size: 6"
Mask aligner, 6".
CANON PLA 600 FA is a precise mask aligner that can be used in a variety of photolithography applications. It is capable of accurate, high-resolution, reliable mask alignments with an ±5µm field of view, making it an ideal choice for precision applications. The mask aligner utilizes an electron beam lithography (EBL) system to achieve the highest resolution results and comes equipped with a base frame and scan heads, mounted line fine-tuners, and a mask exchange mechanism. CANON PLA-600FA has a special feature that allows it to easily change the focus and size of the electron beam pattern, making it a great choice for applications that require various features and dimensions. This feature also increases the speed of operation. The mask aligner also offers low-cost operation due to its high energy efficiency and it comes with an integrated safety system that prevents misalignment errors. PLA 600FA has a maximum download rate of 45mm/sec and a maximum mask surface area of 500mm x 500mm. Its built-in exposure range from 0.3µm up to 5 μm. Its maximum numerical aperture is 0.078 and its maximum resolution is 125nm. The mask aligner also features an adjustable multi-step scan head with an exposure time range of 0.01 seconds to 5,000 seconds. CANON PLA 600FA is designed for easy setup and operation as it comes with a user-friendly touch display and an intuitive graphical user interface. The system also includes a two bin cassette loading feature that makes it easy to loader different masks without having to move them manually. With its fast startup, high accuracy, and extended scan head range, PLA-600FA is an ideal tool for photolithography applications requiring precise results.
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