Used AMAT / APPLIED MATERIALS SemVision G2 #9160447 for sale

ID#: 9160447

Vintage:

2002

Wafer Size:

12"

Equipment Details:

Defect review system, 12"
Tool model: DRSEM G2
Loading configuration: TDK TAS300 Loadport
BROOKS Robot
Beam source: SE-Gun tip
Resolution: 4nm (1 keV at tilt 0°)
Column vacuum: < 5.0E-10 torr
Throughput: 11 Wafer/hr
SEM Accelerating voltage: 600 V - 15 kV
Magnification: 500x - 200000x
Multi perspective SEM imaging
Gun life time: >1 year
Optical microscope: 2.5x / 20x / 100x
Tilt: 0°, 15°, 45°
Image format: TIFF

Function:
Optical microscope
Automatic defect review
Automatic defect classification
Column tilt 45°
SDD
EDX Standard type

Component:
Main unit
Operator console
EPDU
UPS
FFU
Isolation block
EDX Compressor

System power rating: 208 VAC, 3-Phase
2002 vintage.
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