Used HERMES MICROVISION / HMI eScan 500 #9285022 for sale

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HERMES MICROVISION / HMI eScan 500
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ID: 9285022
E-Beam inspection system.
HERMES MICROVISION / HMI eScan 500 is an automated mask and wafer inspection equipment that provides a reliable and accurate way to identify defects in semiconductor and display lithographies. HMI eScan 500 utilizes four distinct inspection elements - Enhanced Repair and Fabrication, Robotic Wafer Inspection, Multi-Beam Analysis and Inspect System Software - to provide accuracy and quality assurance for critical processes such as die-to-die inspection, reticle inspection, and flat-panel LCD wafer inspection. The Enhanced Repair and Fabrication Technology (ERFT) enables HERMES MICROVISION eScan 500 to identify critical fabrication problems, such as pattern defects, imaging haze, and edge waviness. Robotic Wafer Inspection (RWI) uses a robot arm to scan complex surfaces, such as flat-panel LCD wafers. Features such as alignment to a reference die, plus die-to-die inspection, help optimize wafer throughput and process control. Additionally, it features a vision-based unit that uses multiple beams that can be used for critical die defects that were not initially detected by the ERFT machine. Using the Multi-Beam Analysis Technology (MBAT) lens, eScan 500 can figure out the cause of problems quickly and accurately. Electron beam (e-beam) or laser scanning is used to identify the exact location of suspected defects. Using microscopy and software, HERMES compares machine-readable scans against a reference standard to determine if the defect needs to be repaired. Additionally, MBAT on HERMES MICROVISION / HMI eScan 500 can generate images of these defects and capture them to provide physical evidence to the planner or engineer. Finally, the Inspect Tool Software (ISS) allows for precise adjustments to the imaging parameters and laser spot size and position using "Process Maps" or "pixels." This ensures that images are always within specification for each part of the process, such as alignment, edge treatment, imaging, etc. HMI eScan 500 is an advanced and sophisticated instrument for mask and wafer inspection, ensuring product confidentiality and quality assurance. Its best-in-class technologies enable engineers and quality control personnel to quickly identify defects that may have previously gone undetected. Moreover, HERMES MICROVISION eScan 500 is an affordable and easy-to-use asset that saves time and money for organizations in the semiconductor and display lithographies industries.
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