Used KLA / TENCOR Archer 10 XT #9276005 for sale
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ID: 9276005
Wafer Size: 12"
Vintage: 2004
Overlay inspection system, 12"
With ASYST IsoPort load port, P/N: 9700-9129-01 Rev K
Dual load ports EFEM
With ASYST IsoPort
Signal light tower
BROOKS AUTOMATİON Handler with pre-aligner and robot
SBC Controller
Robot controller
Handler
Pneumatic box
Z-Stage
Optic
Computer
Monitor
Floppy Disk Drive (FDD)
CD ROM Drive
Tape drive
Printer
EMO
Shelf
Keyboard
Mouse
Missing parts:
I/O Interface board
Floatation controller
Motion controller
Hard Disk Drive (HDD)
Power supply:
230 VAC, 11.3 A, 50/60 Hz, Single phase
208 VAC, 12.5 A, 50/60 Hz, 2 Phase
2004 vintage.
KLA / TENCOR Archer 10 XT is a high-end mask and wafer inspection equipment developed to provide improved performance of on-chip defect inspection. KLA ARCHER10XT is designed to provide higher throughput rates and improved sensitivity for defect inspection. TENCOR ARCHER 10XT utilizes a field effect transistor scanner (FETS) to enable sensitivity to nanometer-sized defects, and obtains digital images with submicron resolution. It is equipped with an advanced high-speed scanner and imaging technology modules which allow for continuous imaging of wafers while increasing throughput rates up to 20 wafers per hour. KLA Archer 10 XT offers advanced mask pattern recognition capabilities which allow for automated pattern recognition of semiconductor wafers. Advanced alignment technology ensures precise alignment of mask patterns and wafer images for accurate identification of defects. The system utilizes a high-performance CCD array and advanced optics to enhance image acquisition and improve defect detection accuracy. The unit also incorporates a sophisticated image processing machine which is designed to detect and classify defects based on pre-defined criteria. This capability allows for improved defect detection and classification in accordance with industry guidelines. Advanced signal processing techniques are used to characterize defect types and determine appropriate responses for action. TENCOR ARCHER10XT offers a user friendly interface and is fully compatible with computer aided tools such as fab control software. Additionally, the tool can be integrated with parent and up-stream systems to enable seamless, automated data collection and analysis. The asset also allows for the centralized management of inspection jobs and data logging for advanced reporting and data management capabilities. ARCHER 10XT offers superior resolution, faster throughput and increased sensitivity over conventional inspection systems. This model is an ideal choice for semiconductor manufacturers who requires high-performance and accurate fault detection.
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