Used KLA / TENCOR Terascan SLF576 #9276278 for sale

KLA / TENCOR Terascan SLF576 is a comprehensive mask and wafer inspection equipment designed for semiconductor fabrication applications. The system comprises an integrated scan-overlay and image-splicing technology that offers high-resolution 3D inspection for complex patterning features and scaling of the production process. With KLA Terascan SLF576, users can capture full-field images from multiple perspectives to locate any potential defects on the mask. The unit's scan-overlay and image-splicing technology ensures that the same area of the mask can be inspected from multiple angles without causing any shift in the relative positions of the observed features. The machine also offers comprehensive automation capabilities so that users can easily and quickly complete inspections of the mask surfaces with relatively little operator intervention. TENCOR Terascan SLF576 is equipped with industry-standard camera navigation tools for both manual and automated manipulation of the image information, allowing users to quickly locate any defect. In terms of hardware, Terascan SLF576 is built around a lensless strobed illumination tool, which yields images of unparalleled clarity and detail. The asset also features a high-speed, high-resolution CCD camera that has a resolution up to 1.3µm. To support the inspection process, the model includes a powerful wafer alignment equipment that uses a variety of vision algorithms to facilitate accurate lobe placement and positioning. The result is that patterns on the mask are accurately matched between different fields of view or between different wafer sites. In terms of software, KLA / TENCOR Terascan SLF576 features a variety of defect detection and image analysis tools that are included to further support the inspection process. These embedded tools enable users to evaluate different aspects of an image, such as edge intensity, noise levels, and line widths, in order to quickly identify and isolate any potential flaws. In order to ensure exceptional system performance, KLA Terascan SLF576 is designed with hot-swappable, field-replaceable components, which allows users to quickly and easily replace defective parts if needed. Additionally, the unit offers advanced real-time thermal imaging to identify hotspots and measure power consumption variables. Overall, TENCOR Terascan SLF576 is an excellent solution for mask and wafer inspection needs in semiconductor fabrication. With its advanced scan-overlay and image-splicing capabilities, the machine can capture and analyze high-resolution 3D images to quickly and accurately identify any potential defects. In addition, Terascan SLF576 comes with comprehensive hardware and embedded software tools to support and automate the inspection process.