Used SCHMITT INDUSTRIES TMS-3000WRC #9225643 for sale

ID#: 9225643

Manufacturer:

SCHMITT INDUSTRIES

Vintage:

2014

Wafer Size:

5"-12"

Equipment Details:

Surface roughness system, 5"-12"

Non-contact measurement
Full surface scan
Front and backside measurement
Friendly GUI
Mapping (Color plot) function

Measurement material: Bare silicon wafer / Coated silicon wafer
Measurement size: 4"-12"
Measurement thickness: < 100 um
Water chuck method: Vacuum chucking

Rotary stage:
Repeatability: +/- 0.01°
Accuracy: +/- 0.05°

Linear stage:
Repeatability: +/- 0.01 mm
Accuracy: +/- 0.03 mm

Computer: Pentium class computer
Data generation: ASCII / SPC / Color plot with scan notes

Measurement specification:
Source: Class II Laser, 670 nm
Spot size: ~1mm Diameter
Measurement points: Programmable (Single point to full map)
Data type: Ra, RMS(Rq), PV, TIS, Haze
Edge exclusion: 1mm
Measurement speed: 20 to 100 Measurement points / sec
Measurement range: 0.2A to 10,0000A (RA or RMS)
Resolution: 0.02A
Repeatability: +/-0.10A
Reproducibility: +/-0.20A (Reloaded)

Filtering band:
Low band: 0.026 to 0,129 um - 1 (7.8 to 38 um)
High band: 0.129 to 1.4 um - 1 (0.88 to 7.8 um)
Full band: 0.026 to 1.14 um - 1 (0.88 to 38 um)
Comp band: Selectable from 0.2 to 150 um

Temperature: 5°C ~ 40°C
Vacuum: -9.3 Pa
OD Tube connector: 6mm
Standard AC power code

Power: AC 100-240 V, 50/60 Hz
2014 vintage.
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