Used SVTA / SVT ASSOCIATES 440 S1 MBE #9230364 for sale

ID#: 9230364

Wafer Size:

3"-4"

Equipment Details:

Molecular Beam Epitaxy (MBE) system, 3"-4"
SVT Silicon MBE epitaxial
Included: OMICRON Electronics
Method: Thin-film deposition of single crystals
Transistor: Cellular phones & WiFi

Load lock:
Chamber with water cooling
Quick hatch with O-ring seal & CF copper gasket option
GP Model 204 gold seal valve (Roughing line)
Sample heater: 200° C
Heater power supply: 1000 W
Dimension heater control loop
Wafer cassette holder, 8"
(8) MO Wafer holders, 8"
Manual gate valve (VAT) (Between loadlock & intermediate chamber)
HPS Series 421 cold cathode gauge & controller (Wide range)
Cryopump UHV, 6"
Gate valve: Cryopump, 4 1/2" (Pneumatic)
(3) Sorption pumps with plastic dawars, heaters & manual valves
PIBA Venturi pump with manual valve
GP Model 275 convectron gauge with digital controller
Vacuum plumbing for roughing

Intermediate chamber:
(2) Transfer rods: Growth chamber & outgas station
Cassette storage elevator (Manual)
Ion pump 400 1/8 with PERKIN ELMER 1500 digital controller
Sublimator & controller (TSP)
Gate valve: Ion pump, 8" (Pneumatic)
GP Model 307 extended (3) gauge controllers with ionization gauge
10" Gate valve (Manual) between intermediate chamber & outgas station
Rough plumbing with GP 204 gold seal valve
(2) Viewports for docking

Outgas station:
Water cooled chamber with expansion port
Viewport with shutter
Stage
Heater 1100° C with TC
Heater power supply: 1000 W
Dimension control loop
Ion gauge
Cryopump, 8" UHV
Gate valve,10" (Pneumatic) for cryopump
Rough plumbing with GP gold seal valve for chamber
Rough plumbing with GP gold seal valve for cryopump

Growth chamber:
Dia chamber, 24" with water cooling
Sample manipulator with Z-motion & 60 RPM rotation
Passivated graphite heater, 4": 1100°C
Heater power supply: 1000 W
(7) Dimension control loops
Ion pump 400 1/8 with PERKIN ELMER 1500 digital controller
Sublimator & controller: Ion pump (TSP)
VAT Valve, 8" (pneumatic): Ion pump
Cryropump, 8" UHV
Cryropump compressor run (3) UHV pumps, 8"
Gate valve, 10" (pneumatic) for Cryropump
GP Model 307 Ion gauge controller & gauge
(2) Thermionics 156 cc single pocket E-gun with pneumatic activated
soft shutter & water shroud
L-H 4x7cc Pocket E-gun with pneumatic activated soft shutter & water shroud
15 kW E-beam power supply with (3) sweeps
(4) Standard 20cc (K-Cells) effusion cells
(2) High temperature 10cc (K-Cells) effusion cells

(4) Power supplies 1000 W for Std K-cells
(2) Power supplies 1600 W for high temperature K-cells
(6) Water cooled effusion cell shrouds with pneumatic activated soft shutters
(10) Loop dimension multi-loop controllers with relay & CPU interface
SVT Shutter controller
(2) Sentinel III flux sensors & X'tal sensor with additional beam splitter
Sentinel III deposition controller
RHEED System with power supply, shutter, screen, lead window, & controller
Option: VIEETECH 30 key / KIMBALL PHYSICS 20 kev
RGA UTI-l00C System with TEKTRONIX 5111A scope & 5A 15N & 5B1 on plugins
Movable ion gauge: Flux control
Master shutter (Pneumatic)
Rough plumbing & gold seal valves: Cryropump
Bakeout heaters, timer, fans & soft blanket
Viewports & shutters required: Docking & E-guns (Reference port schedule)
(2) Implanter port soft shutters
System upgrade chambers, 8" / Manipulator, stages & valves
(6) PBN STD Crucibles
(2) Hi-temp crucibles
CPU 386/20 MHz IBM Compatible with hardware
Water distribution panel
System console
Rough plumbing with GP gold seal valve for main chamber
Gate valve, 10" (Manual) isolate growth chamber from intermediate chamber.
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