Used AIWA AU-501CO #9261216 for sale
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AIWA AU-501CO is a versatile and high-performance wafer processing equipment designed to meet the requirements of advanced semiconductor device fabrication. Utilizing a unique modular design, AU-501CO is capable of performing a wide range of processes including etching, sputtering, deposition, oxidation, photolithography and photoresist stripping. The system can also be used for a range of other ancillary processes such as Proximity Effects Correction (PEC), Edge Isolation (EI), Particle Interference Containment (PIC) and Diffusion Prevention (DP). AIWA AU-501CO utilizes a high-precision core engine which can process a wide variety of wafer sizes with a minimum wafer size of 4 inches. The high-precision core engine allows for precise wafer-to-wafer moves with repeatability of ±2um and rotation accuracy of ±1°. The unit also offers a comprehensive range of programmable process parameters, enabling fully automated operation of the machine. AU-501CO features a suite of advanced control systems that offer advanced control and monitoring of processes. At its heart is the Automated Process Control and Monitoring Tool (APCMS), which provides a number of features including wafer load diagnostics, process sequence settings, alarms & monitoring, and fault detection & isolation. The asset also features a powerful data acquisition and process analysis model which can store up to 4GB of device data. AIWA AU-501CO offers a range of user-friendly features, including a graphical user interface which allows for visual confirmation of process sequence data. This equipment also includes an automatic Stop-at-Error function, enabling quick recovery in the event of a process failure. Additionally a Recipe Substitute Alarm feature is available, allowing users to easily substitute components without needing to reset the whole system. Overall, AU-501CO is an advanced and reliable semiconductor device processing unit that is capable of meeting the most demanding requirements of advanced semiconductor device fabrication. The machine utilizes a modular design which allows for efficient and precise process control and monitoring, while a wide range of user-friendly features make the tool easy to use even for non-expert users.
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