Used AQUEOUS TECH AQ 400CL #9032311 for sale

ID: 9032311
Vintage: 1997
Batch cleaner 208 V, 1 phase, 60 Hz, 50 A Missing controller 1997 vintage.
AQUEOUS TECH AQ 400CL is a next-generation wafer processing system designed for high-throughput, automated wafer cleaning and drying. It is powered by AQUEOUS TECH proprietary Cloud-Ready Platform, which uses cloud-based SOPs, data acquisition, and remote monitoring and communication. With a modular design featuring four processing modules, AQUEOUS TECH AQ 400/CL is ideal for high volume production of a wide range of substrates, from mainstream semiconductor to MEMS, MEMS-A, microfluidics, and numerous other applications. AQ 400CL's modular design allows for maximum versatility, compatibility, and flexibility. The four integrated modules - Process Module, Clean Module, Air Purge Module, and Chamber Control Module - offer a range of capabilities. The Process Module offers advanced wafer prepping, wet processing, and material transfer, while the Clean Module provides cleaning, drying, and non-volatile deposit removal. The Air Purge Module provides purge, flush and vent cycle support, as well as an airtight seal, while the Chamber Control Module controls partial chambers. AQ 400/CL's Cloud-Ready Platform assists operators with remote programming, monitoring, and troubleshooting for both hardware and software. With repeat feature-to-process matching, multi-location monitoring, and simultaneous execution of different software configuration and operations, users can collect data to improve operations and save processing time up to 50%. The platform also offers remote SOPs, documentation, and a full suite of diagnostic reports. In addition to its four processing modules, AQUEOUS TECH AQ 400CL comes with a variety of features to ensure optimal performance. It has a PTFE coated chemical-increasing chamber design to support wet processing in a wide variety of chemistries, as well as a fully automated clean-load-unload system. Its in-situ chamber clean functions as a self-clean cycle and helps maintain processes within tight cleanroom standards. Additionally, it is equipped with automated wafer calibration for accurate and reliable wafer tracking and handling. Overall, AQUEOUS TECH AQ 400/CL is the ultimate high-throughput wafer cleaning and drying system. With its Cloud-Ready Platform and a variety of features and functions, it enables operators to optimize process and increase throughput for wafer processing.
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