Used MKS FI80132 #293628188 for sale

MKS FI80132 is a high-powered, automated wafer processing equipment used in semiconductor and MEMS manufacture. The system is designed to rapidly process wafers in a wide variety of environments and supports a number of fabrication technologies, including PECVD and ALD. FI80132 unit is equipped with a 300mm diameter wafer carrier, a slide-out wafer cassette, and a 300mm wafer loadlock. It is a versatile, high-performance machine that can scale up to accommodate varying fabrication requirements. The tool uses a vacuum bucket to position and locate wafers for processing. It uses a programmable x-y wafer stage to move wafer batches across multiple process stations. This allows for the rapid processing of large batches of wafers in a short amount of time. The asset is equipped with several automated functions, such as barcode scanning and pattern recognition. This reduces manual handling of the wafers, resulting in increased efficiency. In addition, the high process temperature is maintained thanks to the advanced atmospheres and tempersonics packages. The model also incorporates an automated purge/clean process which provides superior wafer cleaning efficiency. The equipment is also equipped with an advanced wafer transport system which provides a fast, reliable transport along the large processing paths. MKS FI80132 is an ultra-high vacuum unit capable of reaching base pressures of 25 mTorr when properly configured. This is important to prevent the formation of particles which can damage the process. An advanced gas machine and gas flow controllers further reduce the potential for particle contamination. The tool is also equipped with multiple process monitoring systems, including a full range of infrared and laser systems for detecting/identifying process targets. This provides granular process tracking that allows for efficient analysis and control. Overall, FI80132 is an automated wafer processing asset designed to facilitate efficient and reliable semiconductor and MEMS fabrication. It is an innovative model that incorporates multiple advanced technologies such as barcode scanning, pattern recognition, purge/cleaning processes, gas flow controllers, and process monitors. This combination of features greatly increases the efficiency of processing, resulting in faster time-to-market and lower costs.