Used KLA / TENCOR / PROMETRIX 6420 Surfscan #9295095 for sale

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ID: 9295095
Vintage: 1997
System Argon ion laser, 30 mW (Max power of 0.5 W) Power supply: 200-240 V, 2 kVA, 208 VAC, 3-wire, Single Phase, 50/60 Hz 1997 vintage.
KLA / TENCOR / PROMETRIX 6420 Surfscan is a wafer testing and metrology equipment designed to provide precise measurements of wafer surfaces and mid-level features. This system offers a wide array of features and specifications to help ensure accuracy and efficiency for both laboratory use and high volume production. The Surfscan 6420 unit is equipped with a brightfield microscope that utilizes stitching to create a full image of the wafer, providing a more comprehensive view of the surface. The microscope captures images with up to 1,000,000 pixels resolution, and a field depth of up to 1200µm. An advanced imaging machine, it offers high-level optical analysis with focused ion beam imaging (FIB), enabling fast and accurate measurements. This tool is also capable of data analysis and defect review through a software suite for image analysis and defect inspection. With the software, users can access multiple data files and perform analysis including automatic classification, report generation, and statistical reports on defect characteristics. The Surfscan asset also includes a 3D surface metrology module that offers high precision measurements of nanometer surface topography features. It utilizes laser interferometry for accurate measurement of surface heights on a variety of substrates. This model is also capable of measuring overlay, critical dimensions (CDs), wafer flatness, and contour height maps. Furthermore, the equipment includes a full suite of hardware and software features such as interactive user interface, map display, automated job submission, data comparison, out-of-specification detection, and algorithm-based defect classifiers for improved accuracy. These features enable efficient and accurate production line analysis for customers in the semiconductor and electronics industries. KLA 6420 Surfscan offers a wide array of features, dependable accuracy, and an intuitive user interface to assist laboratories and production lines in performing in-depth wafer surface analysis. With its advanced imaging system, reliable metrology capabilities, and comprehensive suite of software features, the Surfscan is a reliable and powerful choice for wafer testing and metrology.
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