Used KLA / TENCOR / PROMETRIX 7600 Surfscan #9065953 for sale

KLA / TENCOR / PROMETRIX 7600 Surfscan is a tool for wafer testing and metrology. It enables users to perform advanced defect detection, mapping, and review in order to support qualification and optimization of lithography processes and engineer defect signature analysis of next-generation lithography technologies. It has the capability to deliver a wide range of inspections, including optical critical dimension (OCD), wafer surface topography (3D/2D) measurements, defect review, and optical metrology. KLA 7600 Surfscan features an automated focus alignment, allowing users to achieve superior OCD scan quality on both 45nm and 90nm nodes wafers with high throughput. It also has an Auto-inspection system, which provides high-resolution defect capture from wafers at 2nm spacings using a patented Smart Mode algorithm. The dynamic focus sensor is used to improve focus stability across a scan using a sensor that constantly monitors and adjusts the focus as the scanning progresses. TENCOR 7600 Surfscan has a Litescan tool to detect and image defects in different shapes and sizes. The tool uses an infrared laser which illuminates the wafer and captures images with no contamination or damage to the wafer. It is also equipped with a MicroMapper feature, which can detect ultra-fine defects. The defect data from each wafer is stored in a database so that it can be compared to other wafers using the 3D mapping feature. PROMETRIX 7600 Surfscan combines several technologies, making it one of the most powerful wafer testing and metrology systems available. It can provide detailed defect analysis, sophisticated pixel-level scanning, statistical data analysis, and defect review. This combination of features ensures that users can accurately and effectively characterize may types of defects and improve process improvement.