Used KLA / TENCOR / PROMETRIX 7600 Surfscan #9122626 for sale

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ID: 9122626
Wafer Size: 2"-8"
Particle inspection system, 2"-8" Model no: 249505 Particle sensitivity: 0.15 um 1995 vintage.
KLA / TENCOR / PROMETRIX 7600 Surfscan is a leading-edge wafer testing and metrology equipment. The Surfscan 7600 is a fully automated tool, designed to deliver world-class performance and comprehensive process control for wafer fabrication, as well as for advanced R&D applications. The 7600 features a powerful and robust optical design to enable superior wafer inspection, precise wafer topography measurement, high throughput and complete data integrity. The system offers a step-based metrology configuration, allowing for expanded control and flexibility in process development. Its versatile optical platform provides various optics, allowing for effective analysis in different areas such as defects, dimensional inspection, and roughness of critical-dimension patterns. Furthermore, the Surfscan 7600 includes a built-in data processing unit that accurately segregates, classifies, and provides immediate feedback on detected defects. The machine also has several incorporated processing features, including multiple wavelength optical imaging, full field characterization, adaptive gain adjustment, rapid image correlation, and enhanced defect detection capability. Furthermore, the 7600 can integrate in-line with existing process equipment, allowing for further process control and customization. Data obtained from the tool is presented in an intuitive and easy-to-understand format. The Surfscan 7600 is capable of comprehensive wafer analysis, making it a valuable tool in advanced research and development. Its range of measurement capabilities allows for precise control over optical processes. The asset is also recognized for being reliable and highly robust, with its capabilities making it a essential in numerous wafer fabrication businesses in the industry.
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