Used KLA / TENCOR SP3 #9183008 for sale

KLA / TENCOR SP3
ID: 9183008
Wafer Size: 12"
Vintage: 1998
Wafer particle counter, 12" 2012 vintage.
KLA / TENCOR SP3 is a mask and wafer inspection equipment designed for the semiconductor industry. This system utilizes high performance optical and imaging systems to automate the inspection process for wafers, masks, and lenses. The unit contains several components, including an optical platform, image analysis and imaging components, and advanced touchscreen data review. KLA SP-3 is built around a high-resolution, fully charged device imaging CCD with up to 13K pixel resolution, which produces high resolution images of wafer, masks, lenses, and other components. In addition to capturing high-quality images of devices, TENCOR SP 3 can also capture defect images and make die-by-die comparison with a reference sample. In this way, the machine can detect the location, type, and size of any defects that may impact wafer performance. The tool is equipped with a powerful imaging and data review interface, providing users with a true graphical environment for reviewing and making comments about wafer performance, including both trend plots and CD maps. This advanced technology includes easy-to-use features, such as SmartDefect Recognition and defect classification, to help quickly identify and analyze defect characteristics. The asset also includes a built-in defect library and high-performing software algorithms, which can provide users with fast, accurate analysis of wafers and masks. KLA / TENCOR SP 3 combines advanced imaging technology with easy-to-use touchscreen features and highly intuitive user interface. With the model's convenient user interface, users can quickly access inspection results from any point in the production line, at any scale, for easy-to-understand graphical presentations. All the components included in the equipment are fully compliant with industry standards for safety and accuracy. KLA SP3 is a revolutionary mask and wafer inspection system, designed to provide semiconductor manufacturers with the most effective, accurate, and reliable way to detect, analyze, and repair defects in wafer, masks, and lens components. The unit features robust imaging and data review features, allowing it to provide detailed information about defect characteristics for maximum cost savings and improved device performance.
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