Used FSI / TEL / TOKYO ELECTRON Mercury MP #9271639 for sale

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FSI / TEL / TOKYO ELECTRON Mercury MP
Sold
ID: 9271639
Wafer Size: 6"
Spray cleaning system, 6".
FSI / TEL / TOKYO ELECTRON Mercury MP is a photoresist equipment developed by FSI, in cooperation with TEL Tokyo Electronics. It is a high-throughput tool for achieving the desired patterns on semiconductor wafers by exposing the photoresist layers on the wafers. It has a high degree of performance and accuracy, making it a powerful system for producing a wide variety of patterns. The unit features an exposure machine, a wafer pre-treatment tool, a post-exposure baking asset, and a track model. The exposure equipment utilizes a laser exposure source, which is capable of producing an intense exposure pattern, and an automatic vision system, which is capable of accurately placing the exposure pattern on the photoresist layer of the wafer. This ensures that the pattern produced is highly accurate and high precision. The wafer pre-treatment unit has an automated spin-rinse-dryer cycle that combines cleaning, rinsing, and drying steps, to ensure that the wafer is free from contaminants before exposure. The post-exposure baking machine provides a uniform, high temperature bake of the photoresist layer, which is necessary for good imaging performance. Finally, the track tool offers the highest levels of loading and unloading performance, with its mechanical and electrical systems designed to ensure safe, efficient, and repeatable results. The asset has a small footprint, while offering a large capacity, which makes it a cost-effective solution for compact processing equipment. Together, the features of the model offer a powerful combination of performance, accuracy, and throughput that are ideal for producing a wide variety of patterns on semiconductor wafers. The equipment is easy to operate and can be integrated into an existing semiconductor manufacturing process.
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