Used FSI / TEL / TOKYO ELECTRON Mercury MP #9274762 for sale

FSI / TEL / TOKYO ELECTRON Mercury MP is a "photoresist" equipment that is designed to enable ultra-fine patterning of devices with dimensions measuring less than 100 nm. FSI Mercury MP can accomplish this precision patterning in a variety of ways, including electron beam lithography, x-ray lithography, ion beam lithography, direct laser lithography, and nano imprint lithography. The system utilizes a G-line 248nm and an I-line 365nm ultra-fine photolithography lens to provide a high resolution with a maximum linewidth of 13.5nm. Additionally, a digital beam intensity control unit is employed for precise control of the electron beams for high accuracy patterning and improved overlay accuracy during production. For image optimization, TEL Mercury MP features a sophisticated double-dot imaging technology, which allows for the use of two different images in the same pattern. To ensure high throughput, TOKYO ELECTRON Mercury MP features an advanced integrated management of images, parameters, and mask data. This allows technicians to access this information seamlessly at the production floor. The machine allows for the control of the process conditions for precise control of the lithography process. This includes temperature, humidity, particle control, and air cleanliness, which can be adjusted on a machine-by-machine basis and all monitored in real time. In addition to its precise patterning capability, Mercury MP also offers impeccable device integration, through its fully automated fabrication process. This allows precise control of lithography, etching, loading, and masking processes to enable high-yield, high-precision device production. Furthermore, process control is aided by an onboard advanced control unit, allowing production to be adjusted on the fly. Ultimately, FSI / TEL / TOKYO ELECTRON Mercury MP tool is designed to enable production of ultra-fine device sizes with the highest resolution and accuracy, enabling technicians to create the devices their customers seek in a reliable, consistent and efficient manner. This photolithography asset is an invaluable tool for cutting-edge device fabrication.