Used FSI / TEL / TOKYO ELECTRON Polaris 1000 #9264626 for sale

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FSI / TEL / TOKYO ELECTRON Polaris 1000
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ID: 9264626
In-line cluster Coater / (2) Developer systems.
FSI Polaried 1000 (FSI / TEL / TOKYO ELECTRON Polaris 1000) is a photoresist equipment used in semiconductor manufacturing processes. Photoresist is a photosensitive material applied to the surface of a semiconductor wafer in order to create patterns in the device's various layers. This is important for the manufacture of integrated circuits, as it allows for the precise and accurate placement of transistors, capacitors, and other components. FSI Polaris 1000 system uses deep ultraviolet light (DUV) to quickly expose photoresist on a variety of substrates. This light is provided by a single 400mm titanium doped sapphire (Ti:S) lamp, which delivers light at a wavelength of 250nm. Additionally, the unit is able to accommodate a variety of different illumination modes, including rectangular parallel, annular, and uniform scan. TEL Polaris 1000 also features a fully automatic charge-coupled device (CCD) metrology machine, used to measure photolithography-related parameters. This tool is capable of measuring the linearity and hot/cold displacement of images on the wafer surface. Additionally, the asset is equipped with shutter and auto-focus modules to ensure that the photoresist is precisely exposed. Polaris 1000 is designed to be used in a cleanroom environment. It is rated at Class 1,000, meaning it is engineered to maintain a cleanroom environment with no more than 1000 particles of size 0.5μm or larger per cubic foot of air. Additionally, the model is able to store up to 50 recipes, making it easy to quickly program repetitive operations. TOKYO ELECTRON Polaris 1000 is an easy-to-use, reliable, and efficient photoresist equipment for semiconductor manufacturers. It is capable of producing high-precision images on a variety of different substrates, and its CCD metrology system allows for accurate measurements of critical process parameters. With its integrated safety features, FSI / TEL / TOKYO ELECTRON Polaris 1000 is a great choice for any semiconductor fabrication facility.
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