Used FSI / TEL / TOKYO ELECTRON Polaris 2000 #9158303 for sale

FSI / TEL / TOKYO ELECTRON Polaris 2000 is a photoresist processing equipment designed for the next generation of advanced integrated circuit fabrication. Photoresist processing is an essential technology in the fabrication of integrated circuits, since it is used for the creation of patterns on layers of photosensitive material. FSI Polaris 2000 is equipped with an advanced two-sided spinning wafer holder to promote the uniformity of the photoresist coating. The system also includes a wet processing station, with automatic module washing for efficient manufacturing, as well as automated anti-reflective coating. The unit is designed to ensure accurate pattern registration and high resolution optical performance, ensuring that intricate designs can be accurately replicated on semiconductor wafers. Additionally, the machine can process multiple types of resist material, including both positive and negative tone material, making it easy to use in both development and production. The tool also has the ability to incorporate mix and match modules to match specific customer application needs. The mixing and matching modules include a heat temperature scan, a design-rule-checker, and a planar processing module. In addition to its fast and accurate photoresist processing capabilities, the asset also features an innovative user interface for improved productivity. The easy-to-use graphical user interface (GUI) allows operators to quickly customize recipes and quickly adjust process parameters without having to manually adjust balances. Finally, TEL Polaris 2000 has a built-in self-testing model to ensure that the equipment is operated properly before and during production. This system includes a self-diagnosis module, a maintenance cycle module, and a sustained quality assurance module. Such a comprehensive unit helps users to get the most out of their photoresist fabrication process, ensuring a consistent and high quality yield.