Used FSI / TEL / TOKYO ELECTRON Polaris 2200 #9148882 for sale

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ID: 9148882
Cluster spray coating / Processing system Computer control (2) STAUBLI UNIMATION robotic arms Nesting station Chill unit.
FSI / TEL / TOKYO ELECTRON Polaris 2200 is a high-performance photoresist equipment designed for a range of production processes from those involved in chip fabrication to optics applications. It is an ideal tool for both high-volume production and advanced research and development. FSI Polaris 2200 features a high-precision, linear 5-axis robot for accurate processing of wafers, substrates, and optics; a high-performance projection optical system with low-distortion lenses for accurate optical imaging; a high-precision closed-loop unit for precise motion control; and comprehensive safety features. This machine is designed to give customers maximum throughput, best-in-class image quality, and process control. Using the latest technology in lithography and wafer-and-optics inspection, TEL Polaris 2200 can produce reproducible images with outstanding image and line quality. The tool's unique process recipes offer customers a wide range of processing options and flexibility. In addition, its advanced image-inspection technology ensures highly reliable production. Polaris 2200 provides comprehensive process control, enabling customers to quickly customize production processes according to their individual requirements. It features an integrated recipe generator, advanced metrology capabilities, and an intuitive user interface. TOKYO ELECTRON Polaris 2200 also offers an intuitive software package, allowing customers to easily monitor production yields, working parameters, and trends. This ensures optimal process control and yields, and can help customers identify potential improvements. Additionally, with its automated functions, the asset can notify personnel of any irregularities, and allow them to quickly respond. FSI / TEL / TOKYO ELECTRON Polaris 2200 is designed for both high-volume production and advanced research and development. It is well suited to a wide range of production applications, and its advanced features make it suitable for a variety of different customer requirements. Its reliable performance and cost-effective operation ensure maximum customer satisfaction.
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