Used FSI / TEL / TOKYO ELECTRON Polaris 3500 #9092708 for sale

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ID: 9092708
Wafer Size: 12"
Coater / Developer system, 12" (2) Coat/Develop spin modules Coat/blank spin module Prime/Bake/Chill modules; (0) prime stations; (4) bake stations; (3) chill stations Prime/Bake/Chill modules; (1) prime stations; (4) bake stations; (2) chill stations I/O with (2) 12" FOUP platform Scanner Interface 6-Axis wafer handling systems Polaris water chiller II (2) Carbon filter stack modules Robot controller cabiner User Interface Panel Corner Dispense module Electronic control module T/H Environmental control system: cluster Plemm and ram 2000 Facilities platform Electrical power distribution system Stepper breezerway kit.
FSI / TEL / TOKYO ELECTRON Polaris 3500 is a state-of-the-art photoresist equipment capable of producing photoresist layers of excellent quality. The system uses a proprietary blind exposure technology, enabling accurate and repeatable image transfer with minimal defectivity over wide areas. It is capable of processing large wafers of up to 300mm in diameter at high throughput. The photoresist unit incorporates a highly accurate wafer handling machine controlled by an advanced motion controller, and is capable of handling even the most fragile substrates. In addition, the tool has a high resolution linear stage for precise positioning of the substrate relative to the exposure source, and a UV-blocking housing that ensures safe operation during exposure. FSI Polaris 3500 is designed to produce photoresist layers of the highest possible quality. It is equipped with an automated recipe processing asset (ARPS) to control exposure parameters such as energy, dose, and time, and the model is capable of producing highly uniform resist layers in a predictable manner. TEL Polaris 3500 is also capable of achieving best-in-class throughput and process stability. It has an advanced backside cleaning equipment that is designed to reduce wafer defects, as well as a Rapid Run system that allows for faster processing of resist layers. The unit is also equipped with an edge-free surface pre-treatment machine, which prevents resist accumulation at the edges of the substrate, enhancing pattern quality. TOKYO ELECTRON Polaris 3500 is a highly reliable and efficient photoresist tool. Its modular design allows for easy maintenance, and the asset utilizes advanced control algorithms for efficient energy and dose exposure, ensuring the highest levels of process reliability. Overall, this photoresist model provides excellent process results, and is an excellent choice for a wide range of semiconductor applications.
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