Used FSI / TEL / TOKYO ELECTRON Lot of spare parts for Titan MP #9216143 for sale
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ID: 9216143
4 Positions PVDF turntable, 6"
PFA Chamber
Cover with PTFE spray post
(2) 2800 Computer controller
(2) PCB Boards
(2) PFA valves
Rotary union
(2) Drains (N/O, AUX1)
(4) Canisters: H2SO4, HF 5%, HF 1%, HCl, H2O2, NH4OH
Re-circulation tank option for HF etch.
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