Used TEL / TOKYO ELECTRON Clean Track ACT 12 #9412474 for sale
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TEL (TOKYO ELECTRON) TEL / TOKYO ELECTRON Clean Track ACT 12 is an advanced photoresist equipment designed to perform precise, step-by-step processes on delicate and sensitive electronic materials. It uses patented face-down precision track technology to process wafers with a wide variety of precise recipes. The system consists of a main track that can accommodate up to 12 wafers at a time, up to 2 wafer size dispense valves, 2 cleaning bars, 2 syringe pump valves, a vision cassette loader and a radio frequency (RF) module. The vision cassette loader enables the unit to automatically identify and transfer each wafer to the appropriate position in the track. It is also capable of aligning the wafers according to their size and orientation. TEL Clean Track ACT 12 utilizes a specialized photoresist application machine to achieve a clean and consistent surface finish on the finished wafers. The photoresist is applied using two primary methods, dipping and spin coating, with the addition of a variety of other specialty applications. The precision track allows for precise and repeatable application of the photoresist in a clean and debris-free environment, which eliminates potential contamination of the finished wafers. The machine also features two separate cleaning bars, one for the photoresist application side and one for the top and bottom surfaces of the processed wafers. Different cleaning agents can be used to provide a thorough and complete removal of any unwanted particles or residues. A final rinse can also be performed to help ensure all photoresists have been completely removed and the wafers are free of any contaminants. The tool also comes equipped with a dedicated RF module, which enables the operator to adjust the exposure settings of the photoresist to ensure the precise application of the photoresist. This feature allows for fine tuning of the exposure settings to meet the exact requirements of each wafer, ensuring high precision and repeatable results. The asset is also designed for quick and easy maintenance, allowing for fast and effortless cleaning and replacing of wafer holders, photoresist valves and other parts. This ensures optimum performance of TOKYO ELECTRON Clean Track ACT 12, reducing downtime and increasing productivity.
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