Used TEL / TOKYO ELECTRON Mark 8 #9276274 for sale
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ID: 9276274
(2) Coater / (2) Developer system, 8"
Single block
Chemical cabinet
KOMATSU T&H Controller
Adhesion Process Station (ADH)
(2) Chill Plates (CPL)
(4) Low Temperature Hot plates (LHP) with hi-exhaust
(6) High Temperature Hot plates (HHP)
AC Power box
Temperature control
External chemical cabinet
1997 vintage.
TEL / TOKYO ELECTRON Mark 8 is a Photoresist Equipment designed for advanced semiconductor fabrication processes. This system provides a range of features designed to improve overall process performance. It has a 19-inch 640x480 TFT color monitor and a built-in Windows NT operating unit. It is capable of hosting multiple processes such as wafer alignment, substrate mapping, and photoresist spin-coating. TEL MARK8 is equipped with advanced photoresist sensors that can precisely measure the critical dimension of the deposited substrate structures. It also provides an integrated machine that can adjust exposure time for layer-by-layer control, reducing the occurrence of pattern defects. In addition, an auto-liquid dispensing tool enables the user to perform automatic spin-coating. The machine's user interface is easy to learn and use, reducing both the cost and the learning curve. The asset is also designed for efficient operation with various large-screen LCD displays and a user-friendly graphical user interface. The device is equipped with a built-in timer to reduce the errors in exposure, allowing for consistent and reliable photoresist processing. TOKYO ELECTRON MARK-8 also features a built-in safety feature and access protection that keeps unauthorized personnel from entering the machine's chamber. The model is also capable of automatically shutting down in the event of a power failure. Additionally, the machine is designed with real-time equipment monitoring to ensure peak performance. To summarize, TEL Mark 8 is a Photoresist System designed to improve overall process performance. It is equipped with advanced photoresist sensors to precisely measure the critical dimension of the deposited substrate structures. The unit also has an easy-to-use user interface with various large-screen LCD displays and a built-in timer for reducing the errors in exposure. It also features built-in safety features and access protections, as well as automatic shut-down in the event of a power failure.
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