Used ULTRA OPTICS Mini II #9277326 for sale

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ULTRA OPTICS Mini II
Sold
Manufacturer
ULTRA OPTICS
Model
Mini II
ID: 9277326
Hard coater and cure oven.
ULTRA OPTICS Mini II is a new photoresist equipment designed to provide reliable and high-precision fabrication of micro-optical components in various substrates. This system combines several components to create a highly efficient and reliable photoresist unit. The machine provides excellent gate- define performance and low defect levels for fabrication of optical components. It has a compact footprint for operators to easily access and use in any micro-optics fabrication environment. The tool utilizes a precision USQ 193nm rotating projection projection asset which delivers high resolution imaging to the substrate. This rotating model allows for extremely precise alignment of the applied photoresist to geometries on the substrate. The projection equipment is mounted to an XYZ stage for precise positioning of the substrate relative to the projection beams focus. The system also utilizes a 6-Axis robotic arm to accurately transfer substrates between all process modules. The photoresist unit utilizes a multi-jet immersion fluid jet that provides highly precise and accurate dispense of photoresist above the substrate. This process reduces waste during the process and ensures accurate application of the photoresist. Once the photoresist is applied, it is exposed to circular polarized light for the cross-linking reaction necessary to form an image on the substrate. An ultraviolet-visible imaging machine is then used to monitor the cross-linked areas. An automated spin-coater can be used to apply photoresist to large substrates and provide homogenous application. This spin-coater tool is integrated into Mini II asset and allows for automated application of photoresist coating which provides superior process repeatability and accuracy. Finally, the accuracy of the photoresist model is ensured through an integrated control equipment. This system allows the operator to use a graphical user interface to control parameters such as the photoresist dose, camera exposure time, dispense speed, and spin speed. This ensures that the imaging process is repeatable and reliable. In summary, ULTRA OPTICS Mini II is an advanced photoresist unit that provides highly reliable and precise fabrication of micro-optical components in various substrates. It utilizes a precision USQ 193nm rotating projection machine and an automated multi-jet immersion fluid jet to accurately dispense photoresist. An integrated control tool provides process repeatability and accuracy control which ensures high-quality and reliable fabrication.
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