Used STEAG / AST / MATTSON Helios #9219024 for sale

STEAG / AST / MATTSON Helios is a rapid thermal processor that utilizes the technology of Rapid Thermal Processing (RTP). It is a high-throughput, cost-effective process for production of semiconductor wafers. AST Helios is designed to provide accurate, repeatable, and efficient thermal processing in multiple applications that include annealing, diffusion, and oxidation processes. The equipment is configured with an integration-ready furnace design, multiple measurement capabilities, and integrated safety features. STEAG Helios utilizes a versatile furnace design with two heating zones and two cooling zones that are capable of reaching temperatures of 1100°C. The processor allows for precise control of the rapid thermal profile, with temperature transitions of 30 to 500°C/second and residence times of 10 to 60 seconds, making it suitable for fast and precise processing. Additionally, the processor's gas delivery system provides flexibility in atmospheric control, allowing for nitrogen, oxygen, and argon type atmospheres to be created. To ensure safety of the unit, the process chamber is equipped with redundant safety measurements including gas monitor, pressure sensors, thermocouples, and sealed door interlocks. MATTSON Helios is able to accurately monitor a process within a chamber, with integrated optical pyrometers monitoring wafer potentials, and is able to adjust temperatures within 2 mA of the set-point. The processor is designed to integrate with other equipment and utilize a control platform, independent of computer support, allowing for easy and rapid configuration of the desired process parameters. In addition, the processor is equipped with a user-friendly, graphical user interface (GUI) for easy operation and control. Helios is an efficient and effective Rapid Thermal Processor for multiple applications in semiconductor wafer production, and is designed to meet the highest quality requirements for a diverse range of products and processes. The machine offers precise control of temperature profiles, safety features, integrated optical pyrometers, and a user-friendly GUI for easy operation, making it an ideal choice for rapid thermal processing.