Used STEAG / MATTSON / AST 2800 #9202527 for sale

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STEAG / MATTSON / AST 2800
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ID: 9202527
RTP System.
STEAG / MATTSON / AST 2800 rapid thermal processor is a sophisticated semiconductor device fabrication tool, designed to facilitate rapid, precise thermal annealing of intricate semiconductor material. The processor combines the latest in ultrafast heating and cooling technologies to reduce process times while maintaining a high degree of thermal control and symmetry. The device features a dual-zone gas dispersion nozzle, allowing for appropriate gas mixture distribution across the wafer for optimal thermal annealing. In addition, the processor's unique heated susceptor plate ensures proper and consistent heating of the entire wafer surface. This ensures optimum thermal uniformity and repeatability between process runs. Using its on-board computer system, the processor is capable of performing highly accurate thermal profiling of the wafer surface. It achieves this by utilizing a highly accurate heat flux sensor and advanced software control algorithms to measure and record changes in temperature over time with extremely high accuracy. This data then allows for the precision control of thermal annealing times and temperatures, while also providing feedback to ensure that processes remain within pre-determined profiles. In addition, the processor is also equipped with the latest in safety technologies, including an emergency heat rejection system that is capable of rapidly cooling a wafer in the event of an unexpected over-heating situation. Moreover, the processor is rated to operate in up to a 200 mbar pressure environment, ensuring that delicate materials do not experience adverse side-effects while undergoing thermal annealing. Overall, AST 2800 rapid thermal processor is an invaluable tool for any semiconductor fabrication operation that requires fast, precise thermal annealing of delicate materials. Its combination of advanced temperature measurement and control algorithms, along with sophisticated safety features, make it a highly reliable and versatile device for a wide range of processes.
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