Used STEAG / MATTSON / AST 2900 #9182434 for sale

STEAG / MATTSON / AST 2900 rapid thermal processor (RTP) is an advanced high-temperature processing tool designed to be used in a wide variety of high-temperature processes. The RTP is capable of rapidly achieving a temperature range of 300°C to 1200°C (depending upon the specific model), with a maximum ramp rate of 300°C/second. The system is comprised of four main components: the conveyor, furnace hearth, thermal processor, and cooling station. The RTP conveyor is designed to accept a variety of substrate sizes, with custom designs available to accommodate non-standard substrates. The conveyor provides a reliable, repeatable method for transport of materials through the RTP thermal profile. The conveyor's motion is controlled via a closed-loop microprocessor with adjustable settings for speed, acceleration/deceleration, and direction. The maximum belt speed is over 630 mm/second. The 44" long furnace hearth is capable of holding multiple substrates of various sizes, and it is housed within a water-cooled quartz tube with 3" of internal insulation. The hearth and substrate are enclosed within the furnace as the temperature increases and decreases. The furnace achieves a temperature range of 300°C to 1200°C, with an accuracy of +/- 1°C, and is capable of achieving fast temperature ramps up to 300°C/second. The RTP thermal processor is equipped with a suite of three independent control loops. Each loop retains control of its own parameters such as temperature, soak time, and ramp rate. The three control loops operate in parallel, and can be individually adjusted for each substrate size and process. The RTP allows multiple temperature profiles with adjustable dwell times, pre-purge atmosphere, and trim atmosphere, allowing for versatile configurations suitable for wide range of applications. Finally, the cooling station is designed to cool the materials to a safe and suitable handling temperature before it is discharged from the RTP. The cooling rate is adjustable, allowing for different cooling profiles to fit specific applications. In conclusion, AST 2900 rapid thermal processor is a highly configurable, reliable, and repeatable processing tool suitable for a wide variety of high temperature processes. Its advanced features and temperature range make it an excellent choice for a variety of fabrication applications.