Used STEAG / MATTSON / AST SHS-2800SF #9238081 for sale

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ID: 9238081
Wafer Size: 8"
Vintage: 1997
Rapid Thermal Processor (RTP), 8" Implant annealing AST Super heat system Hardware configuration: Main frame (2) ASYST Indexers 2200 Handler system: PRI Robots Process chamber Aligner Rough pump (AA40): Left Heat exchanger (SMC Chiller): Right 1997 vintage.
STEAG / MATTSON / AST SHS-2800SF Rapid Thermal Processor is a specialized device used to facilitate the precise, reliable, and repeatable modification of materials on a microscopic scale. This tool stands as an optimized solution for a variety of processes requiring rapid tempering and precise control of the thermal environment. The device offers a wide range of capabilities that make it an ideal solution for a variety of applications. A resonant frequency drive designed for rapid thermal internal energization of samples minimizes pre-heating time for the entire sample. Once at the required temperature, precise temperature control ensures the sample can be maintained at the precise target. Thermal cycling parameters can be set in one second increments from one to four thousand seconds, which allows for fine control of the thermal historical profile. The device also features an isolated vacuum and gas controlled chamber for protective atmosphere processing. This provides an isolated environment for the sample, protecting it from external contamination as well as controlling the concentrations of any reactive or non-reactive gases in the sample space. For maintenance, a transparent window on the chamber door allows direct visual inspection of the sample while providing access to the chamber if required. AST SHS-2800SF Rapid Thermal Processor is capable of processing both small and large size wafers up to 12 inches. The device is equipped with a safety alarm monitoring equipment, which helps to alert users when any unsafe conditions arise. Additionally, the processor's built-in cooling system helps to maintain unit temperature stability and to decrease downtime. Overall, STEAG SHS-2800SF Rapid Thermal Processor is an efficient and reliable tool for many industries and research laboratories. Its static vacuum chamber and precise temperature control allow for the efficient and repeatable modification of materials. Additionally, Its efficient cooling machine and safety alarm monitoring tool make it a safe, reliable, and effective way for users to quickly modify materials on a microscopic scale.
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