Used AIXTRON 2600G3 HT #9270065 for sale

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AIXTRON 2600G3 HT
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Manufacturer
AIXTRON
Model
2600G3 HT
ID: 9270065
MOCVD System.
AIXTRON 2600G3 HT is a reactor designed for research and development into new semiconductor applications, specifically high-temperature (HT) processes. This reactor is equipped with an advanced temperature control equipment, which is capable of temperatures up to 400°C. It also has a matched pair of susceptor assemblies and three-dimensional (3D) susceptors as well as linear and conical gas-injection grids and high-precision motion control systems for accurate substrate positioning. AIXTRON 2600 G3 HT is a high-performance system with great process flexibility for many film and epitaxy applications. The reaction chamber has a wide design range offering up to 4800W of power, with instantaneous powers at 200-400W. It also has a modulated power unit that can allow for the variation of frequency and peak power for fine-tuning deposition processes. 2600G3 HT has an integrated, advanced process control machine which supports user-defined deposition programs with automated process control. Its computer-controlled subsystem monitors and adjusts process parameters during deposition, such as source gas flow, plasma power, substrate temperature, substrate bias, and inert gas pressure. 2600 G3 HT is designed with ultra-high vacuum systems (UHV), which can handle high temperature processes and reduce the risk of contaminations. Its design parameters make the tool suitable for the production of compound semiconductors such as GaN, GaAs, and ZnSe, as well as for a wide range of tertiary compounds. The use of AIXTRON 2600G3 HT is beneficial for researchers and engineers in the optical and LED industries, as this reactor is also suitable for thin film deposition with optical materials, including low-temperature (LT) and hydrogenated amorphous silicon (a-Si:H). For safety and consistent performance, the asset features advanced diagnostic systems to detect abnormal operating conditions. Its advanced diagnostics help reduce the risk of contaminations by monitoring chamber conditions and gas pressure levels. Overall, AIXTRON 2600 G3 HT reactor is the ideal model for research and product development for the semiconductor, LED, and optical industries. It is safe, reliable, and can perform HT processes as well as reaching precise process control. Its automated processes and integrated diagnostics give researchers the assurance that their work and results are of consistent quality.
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