Used AIXTRON Crius II #9272522 for sale

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Manufacturer
AIXTRON
Model
Crius II
ID: 9272522
Vintage: 2011
MOCVD System Missing parts: Eurotherm Chiller Water pipe 2011 vintage.
AIXTRON Crius II is a high-quality deposition tool designed to meet the requirements of the research and industrial PECVD (Plasma Enhanced Chemical Vapor Deposition) community. Crius II is an upgraded version of AIXTRON Crius, which was a popular tool with reliable performance and broad capability that was known for its fast substrate transfer and optional welded chamber. AIXTRON Crius II improves on its predecessor with an upgraded Versa Platform™ equipment consisting of a low-pressure, single-chamber system, complete automation, and multiple process technologies. The Versa Platform™ unit is designed to provide a versatile, repeatable and reliable PECVD solution, while also offering improved yield homogeneity, inactive chamber time and process flexibility. Crius II comes standard with a programmable substrate heating machine, a substrate pre-cleaning chamber, and advanced remote control of the deposition chamber from the platform's control software. Additionally, the unit comes with a programmable gas delivery tool that can be used to deliver up to three precursor gases for multiple processes, including SiO2, SiN, Ge and Ta2O5. A unique feature of AIXTRON Crius II is its advanced dielectric mirror cavity with Z-shaped RF antenna for efficient generation of plasma with variable PLD/PECVD power settings. This allows for improved deposition uniformity, as well as higher substrate throughput. Additionally, its beam control asset ensures a flat deposition uniformity with a small shadowing effect. Crius II has an optional Viewpoint™ Monitor and Control Model, which allows operators to remotely monitor the health and performance of the deposition chamber in real-time. This equipment provides up-to-date data on the deposition process, as well as an alarm system to alert operators to any process issues that require attention. For further convenience, AIXTRON Crius II is also designed to be compatible with other AIXTRON tools, such as AIXTRON Prodigy Multi-station Unit and AIXTRON SELECT deposition systems. This allows for maximum versatility in setting up a deposition machine, and ensures that Crius II will remain a reliable and efficient deposition tool for years to come.
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