Used AMAT / APPLIED MATERIALS Centura DLH #9093317 for sale

AMAT / APPLIED MATERIALS Centura DLH Series Reactor is a vacuum equipment for high temperature wafer processing. It is an advanced system providing reliable and efficient operation in a compact, user-friendly design. It is designed to be used with a variety of wafer sizes, such as 200mm, 300mm, and large diameter wafers. The unit features high temperature capability of up to 1100 °C, offering the range for high performance process applications. AMAT Centura DLH Series Reactor combines strong thermal performance with excellent machine stability through its unique design and configuration. The integrated reactor design includes a low thermal mass mini-tubular heater with a built-in quartz tube/element for Rapid Thermal Processing (RTP). The mini-tubular design and the silicide insulation promote excellent thermal response, enabling superior temperature accuracy and tight process windows. The DLH heating element is also highly efficient, offering high power input and fast heating rates. In addition, the tool features a robust, discrete-level power control, allowing precise control over the process. The integrated process control unit (PCU) provides precise automation for rapid process improvements. APPLIED MATERIALS Centura DLH Series Reactor offers a range of advanced safety features. An integrity check verifies the performance condition of each asset prior to wafer processing. Additionally, safety interlocks, thermocouples, and inlet pressure monitoring protect and monitor thermal performance for exceptional safety. Finally, a variety of options, such as automatic pressure control, enhanced PID control, and quartz inlet tubes, can be used to further improve model performance. Overall, Centura DLH Series Reactor is a powerful, efficient, and safe equipment for high temperature wafer processing. It features excellent thermal performance with tight process windows and robust process control. Its compact design offers space savings and user-friendly operation. Finally, its suite of safety features provide unparalleled security and confidence in the system's performance.