Used AMAT / APPLIED MATERIALS Centura HTF #9260258 for sale

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ID: 9260258
Vintage: 2006
Epitaxial cluster system (3) Chambers atmospheric: Standard EPI Logitex wafer handling control Cooling circuit with digital flow-meters Door Interlocks PC Controller Temperature control: Dual pyrometer Process gases: TCS, PH3, Porr External cooling: Water cooled CE Marked Power requirements: 480 V, 240.0 Amp, 50 Hz, 3 Phase 2006 vintage.
AMAT / APPLIED MATERIALS Centura HTF (High Temperature Furnace) is a type of out-of-vacuum thermal processing reactor that is used in the fabrication and manufacturing process of semiconductor chips and integrated circuits. Designed to operate at temperatures ranging from 500 to 1200 degrees Celsius, the furnace is capable of advanced thermal treatment applications such as oxidation, nitridation, rapid thermal process (RTP) annealing, thermal diffusion, and other high temperature procedures. AMAT Centura HTF is composed of a four-zone, horizontally-mounted furnace chamber, which is constructed of slotted Teflon or high-temperature alloy material. This chamber is heated by a water-cooled, RF-driven asymmetry induction coils, and can be equipped with gas nozzles for introduction of inert or reactive process gases (such as nitrogen and oxygen) either separately or in combination near the surface of the chips. The temperature of the furnace chamber can be monitored and adjusted precisely by leveraging the Advanced Process Controller, which also offers support for specialized substrate support techniques. The controller connects directly to the Centura hardware, allowing process engineers to adjust and control various parameters including temperature, residence time, and gas flow rates in order to achieve desired results. APPLIED MATERIALS CENTURA HTF is designed with safety in mind, providing effective safety and environmental protection. The chamber is equipped with an explosion control system and complies with OSHA and NFPA standards, while the cooling system is suitably safeguarded against sudden process transfers. Additional safety measures, such as an emergency shut-off switch and a ground fault circuit interrupter are also available. AMAT CENTURA HTF is a cost-effective solution for thermal processing needs and provides excellent quality, repeatability and reproducibility while achieving desired results. As a result, it has become an essential component of semiconductor chip and integrated circuit manufacturing.
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