Used AMAT / APPLIED MATERIALS Endura II #9156594 for sale

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AMAT / APPLIED MATERIALS Endura II
Sold
ID: 9156594
Wafer Size: 12"
Vintage: 2016
Advanced low pressure source (ALPS) ESI chambers, 12" Process: METAL 2016 vintage.
AMAT / APPLIED MATERIALS / AKT Endura II is a versatile, multi-tool reactor platform ideal for process integration and scaling within semiconductor, advanced packaging, MEMs and opto-electronics cleanroom environments. This next-generation solution features an innovative, scalable architecture designed to deliver precision, scalability and improved efficiency for high-throughput, advanced processes. AKT Endura II reactor features a modular, multi-process chamber design coupled with an automated robotics solution allowing for up to 8 load ports. The versatile reactor platform features a wide selection of wafer sizes and process capabilities including: etch, deposition, annealing, dry reforming, custom ALD processes, plasma source/power delivery and process recipe development. Each port can support multiple processes such as etch with atomic layer deposition (ALD), etch/deposition and anneal/deposition. The integrated robotic solution allows for quick, efficient loading/unloading of processed substrates from each port. AMAT Endura II's advanced process control equipment is equipped with advanced collaborative process control strategies (CPC) to expedite advanced process development and optimize process efficiency. CPC utilizes numerous automation and operator logic algorithms to enhance product quality, stabilize transient process states, and monitor process metrics to help mitigate non-uniformity. The central process control station also offers an intuitive user interface ensuring an easy learning curve and rapid product transfer. Endura II's open interlock architecture provides unparalleled tamper-proof safety. The system is outfitted with safety shutdown interlocks, an exhaust unit that complies with current safety regulation, and is fully compatible with NFPA report codes with a patented flame arrestor machine. APPLIED MATERIALS Endura II offers an extensive lineup of process chambers, supply cabinets and multi-zone temperature control, as well as a variety of in-situ and ex-situ process gas sources, RF power supplies, and components to provide greater versatility for custom processing needs. The adaptable substrate and process tooling configuration delivers an improved degree of precision for distributed processing, while offering load-lock capabilities for UV-free, dynamic temperature ramp-up, and extended process times. In conclusion, AMAT / APPLIED MATERIALS / AKT Endura II provides an effective, scalable reactor platform ideal for a range of advanced semiconductor, MEMs and opto-electronics clean room processes. Its modular, multi-process chamber design, state-of-the-art process control and tamper-proof safety solutions deliver improved process and user safety, efficiency and scalability for all manufacturing applications.
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