Used AMAT / APPLIED MATERIALS P5000 #293586392 for sale

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ID: 293586392
CVD System (2) Chambers: Etch oxide, CVD Does not include: Pump Heat exchanger.
AMAT / APPLIED MATERIALS P5000 is a high-temperature thermal processing tool used for the manufacturing of advanced materials, such as silicon-based devices, metals, and semiconductors. This tool is an essential part of the semiconductor fabrication process allowing for the production of integrated circuits with very small features. AMAT P-5000 reactor utilizes a vertical cold wall opposed plasma reactor to provide high doses of phosphine gas to the wafers, and is capable of sustaining temperatures up to 850°C. The high temperature of the tool enables it to be used for advanced processes such as diffusion, oxidation, nitridation, and the deposition of a wide range of materials, such as dielectrics and metals. In addition, the tool can be used for sputter deposition, yielding higher quality films and materials. APPLIED MATERIALS P 5000 is equipped with a dedicated CoolPlasma™ source that enhances the deposition process, improving the rate of film growth and homogeneity as well as increasing throughputs and layers per wafer. Furthermore, the reactor features an independent gas box allowing for a flexible co-deposition of different constituents while protecting the main processing chamber. A temperature control system is integrated into the tool, providing precise processing temperatures, greater uniformity, and improved temperature control over critical processes. A broad range of advanced process technologies have been developed over the years, allowing the tool to be used in a range of applications including plasma enhanced chemical vapor deposition, atomic layer deposition, and metalorganic chemical vapor deposition. P 5000 reactor has a range of advanced features and technologies that make it one of the most advanced thermal processing tools for the application and production of advanced materials. Its advanced plasma source, temperature control system, and flexibility provide users with an accurate and reliable tool for manufacturing a variety of components.
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