Used ASM Eagle 12 RapidFire #9283372 for sale
ID#: 9283372
CVD System, 12"
Chamber A, B and C:
Process: P-TEOS/TMP
Hard: CVD
Gases (SCCM):
Ar (7000)
Ar (500)
He (2000)
N2 (5000)
NF3 (3000)
O2 (3000)
TEOS (300)
TMP (60)
RPU: 400 kHz / 3000 W
HRF: 13.56 MHz / 1000 W
LRF: 430 kHz / 1000 W
2005 vintage.
Manufacturer:
ASMModel:
Eagle 12 RapidFireCategory:
REACTORSVintage:
2005Wafer Size:
12"Equipment Details:
Chamber A, B and C:
Process: P-TEOS/TMP
Hard: CVD
Gases (SCCM):
Ar (7000)
Ar (500)
He (2000)
N2 (5000)
NF3 (3000)
O2 (3000)
TEOS (300)
TMP (60)
RPU: 400 kHz / 3000 W
HRF: 13.56 MHz / 1000 W
LRF: 430 kHz / 1000 W
2005 vintage.
