Used ASM Eagle 12 RapidFire #9283372 for sale

ID#: 9283372

Manufacturer:

ASM

Category:

REACTORS

Wafer Size:

12"

Equipment Details:

Plasma Enhanced Chemical Vapor Deposition (PECVD) system, 12"

Specifications:
Chamber A, B and C:
Process: P-TEOS/TMP
Hard: CVD

Gases (sccm): Ar(7000), Ar(500), He(2000), N2(5000), NF3(3000), O2(3000), TEOS(300), TMP(60)

RPU: 400 kHz / 3000 W
HRF: 13.56 MHz / 1000 W
LRF: 430 kHz / 1000 W.
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