Used ASM Eagle 12 RapidFire #9283372 for sale

ID#: 9283372

Manufacturer:

ASM

Category:

REACTORS

Vintage:

2005

Wafer Size:

12"

Equipment Details:

CVD System, 12"
Chamber A, B and C:
Process: P-TEOS/TMP
Hard: CVD

Gases (SCCM):
Ar (7000)
Ar (500)
He (2000)
N2 (5000)
NF3 (3000)
O2 (3000)
TEOS (300)
TMP (60)

RPU: 400 kHz / 3000 W
HRF: 13.56 MHz / 1000 W
LRF: 430 kHz / 1000 W
2005 vintage.
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