Used OXFORD Plasmalab 800 Plus #9090621 for sale
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ID: 9090621
PECVD Systems
SiOx, SiNx, SiOxNy Deposition
Batch process
Platen: 450mm
With 300°C+ heater
RF Power: 350W 13.56MHz and 300W 480KHz
Gas pod with 6 lines including following MFCs:
N2: 1000sccm
N2O: 100sccm
N2O: 2000sccm
NH3: 100sccm
SiH4: 2000sccm
Windows PC
Currently crated
Not included:
Pump
Chiller
2006-2007 vintage.
OXFORD Plasmalab 800 Plus is an advanced etching and ashing system designed for precise material processing. It is capable of conducting a wide range of processes including both dry and wet etching, ashing, evaporation, and other deposition techniques. As a sputter deposition tool, it can provide effective etching and ashing at low temperatures, from a few hundred to a few thousand Celsius. Plasmalab 800 Plus is a powerful and precise tool for any materials engineer, capable of processing metals, dielectrics, polymers, and other materials. The system features a highly advanced stainless steel vacuum chamber capable of operating in a range of low to ultrahigh-vacuum conditions. A wide variety of materials and components can be loaded into the chamber, including application-specific samples like those used in MEMS and other micron scale technologies. The chamber features an in-vacuum robot manipulator, enabling automated sample exchange and increased throughput. With the addition of advanced temperature controllers, heating and cooling can be accurately maintained within the chamber. The system is controlled through an intuitive touchscreen interface, making it easier to monitor and modify a wide range of parameters prior to, during, and after processes. It includes high-level programming, enabling researchers to create and modify recipes for specific materials, deposition techniques, and substrates. The user-friendly environment enables researchers and engineers to easily access the wide range of advanced etching, ashing, and deposition capabilities provided by OXFORD Plasmalab 800 Plus. Plasmalab 800 Plus is equipped with advanced safety features, allowing for clean and efficient operation. Innovative features such as pressure and temperature sensors throughout the chamber, automatic surveillance, and leak detection all ensure safe operation. The safety features can be configured with a user-friendly interface to monitor and modify the operation in an intelligent fashion, providing efficient and reliable processing. Overall, OXFORD Plasmalab 800 Plus is a superior choice for etching, ashing and deposition processes. Its powerful combination of intuitive operation, precision, and safety makes it ideal for any researcher or engineer looking for reliable and precise material processing. With its ultrahigh vacuum capabilities, advanced temperature controllers, automated sample loading and in-vacuum robot, and comprehensive safety features, Plasmalab 800 Plus is a top-tier tool for targeted and precise processing.
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