Used VEECO / EMCORE E450 #9255826 for sale

VEECO / EMCORE E450 is a horizontal, hot-wall, RIE (Reactive Ion Etching) reactor designed for wafer processing. It is capable of processing 4-inch, 6-inch, and 8-inch wafers. VEECO E450 features an automatic wafer handling equipment, which allows for quick loading/unloading and precise placement of a wafer into/out of the reactor chamber. The chamber's minimum temperature is 25 °C, allowing for precise temperature control during etching. EMCORE E450 has a metal tube construction, and is designed for use in a dual-type enclosure, with an inert (non-reactive) gas purging environment, which allows etching of a wide range of materials with minimal risk of contamination. The reactor is designed to run with a variety of gases, including O2, Ar, SF6, Cl2, BCl3, and combined gases. The low particle contamination allows for production of IC microchips with high yields and product quality. The system features a down-stream gas delivery unit, which ensures a stable delivery of high-purity reactive and process gases. The substrate configuration allows for a variety of process parameters such as pressure, flow, temperature, gas mix, and power so as to optimize the etching process for the desired application. E450 also has VUV (Vacuum Ultra Violet) and RF (Radio Frequency) power supplies, which allow for precision control of process conditions and guarantee good wafer-to-wafer uniformity. VEECO / EMCORE E450 is a reliable and robust reactor machine, designed for etching of a wide range of substrates including silicon, silicates, and polymers. It provides robust results meeting high performance standards, ensuring clean and precise etching. The reactor is a user-friendly tool, providing a simple user interface for quick setup and programmable parameters for process optimization. All-around, VEECO E450 is a reliable and powerful asset, making it a great choice for production in semiconductor device manufacturing.