Used VEECO / EMCORE TurboDisc K465i GaN #9397191 for sale

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ID: 9397191
MOCVD System.
VEECO TurboDisc K465i gallium nitride (GaN) reactor is an advanced semiconductor device used for the growth of complex semiconductor materials. The K465i is a single wafer reactor, engineered with an integrated TurboDisc Atomic Layer Deposition (ALD) and Molecular Beam Epitaxy (MBE) systems. The TurboDisc design of the K465i GaN Reactor ensures a uniform, tool-free, low-cost operation. By integrating a uniform turbo disc-shaped wafer-processing system into its reactor, the K465i can achieve a greater level of precision than traditional reactors. In addition, the turbo disc design minimizes contamination caused by ambient air, reduces thermal stress caused by uneven temperature distribution, and allows for improved process repeatability and higher throughput. The K465i GaN Reactor is equipped with high-stability, high-efficiency Tri-Quadra coil technology capable of producing sustained continuous deposition with minimal power dissipation. Throughout the deposition process, the coil remains stable and reliable, allowing for repeatable process performance with high yields. The reactor also features true-mop mode diffusion covering and convective mass transfer to facilitate large area coverage and improved film growth using low cost materials. In addition, the K465i reactor is designed with an automated control system (ACS) that is capable of monitoring and controlling the growth condition at the supported temperature range of 350-1200°C. The ACS is equipped with a variety of integrated controllers including: heating, safety, and cooling. With this advanced functionality, the K465i can grow materials at a variety of temperatures, pressures, and growth rates, enabling flexible and reliable processes. The K465i GaN Reactor has been proven to produce stable, uniform, high-quality GaN films. With its TurboDisc technology, the reactor is capable of creating GaN films with improved electrical characteristics, superior optical transmission, and enhanced device performance. Thus, the K465i is an ideal choice for creating high-efficiency semiconductor devices in the commercial market.
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