Used FSI / TEL / TOKYO ELECTRON PFA Turntable for Mercury #9252200 for sale

FSI / TEL / TOKYO ELECTRON PFA Turntable for Mercury is a high precision photoresist equipment designed for use in lithography applications. The turntable utilizes a rotating mechanical platform and advanced photoresist delivery system to provide uniform coating of photoresist over a range of substrate sizes and shapes. The unit is designed to meet the most demanding requirements in production lithography, offering superior through-put while maintaining stability of exposure and coating. The turntable machine features a sophisticated closed-loop control architecture, allowing for precise control of the critical direction and velocity parameters during substrate rotation, to maximize uniformity of process coverage. This precision platform is designed to provide low noise and drift, with high precision throughout the process. The turntable utilizes a direct drive motor tool and an ultra-precise angular encoder to minimize any settling errors due to vibration or air disturbances. This ensures repeatability of process results, with the asset able to maintain rotation accuracy and levels of uniformity within the tight tolerances of lithography applications. The mercury source is fitted to the front of the turntable, providing reliable, stable, and energy-efficient delivery of photoresist to substrates. The source can also be optimized using advanced control algorithms to ensure consistent image uniformity throughout the entire process. It is equipped with a number of safety systems, reducing the risk of accidental process contamination. In addition, the turntable features quick-changeover capability, allowing for simultaneous loading and unloading of substrates to improve productivity. The platform is compatible with various formats of substrates, including quartz, glass, silicon wafer and organic substrate. With a choice of loading capacity, including 150mm, 200mm or 300mm, these wafers are quickly processed, providing the necessary accuracy and repeatability in the lithography process. FSI PFA Turntable for Mercury offers a reliable solution for lithography applications, combining a high-precision drive model and advanced photoresist delivery equipment with the latest safety features in a compact and user-friendly design.