Used MRC / TEL / TOKYO ELECTRON Eclipse #166464 for sale

MRC / TEL / TOKYO ELECTRON Eclipse is a sputtering equipment used in the fabrication of semiconductor devices and MEMs. The system consists of both direct- and indirect-sputtering tools, making it ideal for applications such as doping, thin-film deposition, and etching. The direct-sputtering tool employs magnetron sputtering, which uses magnetic fields to ionize and accelerate an inert gas to create a plasma which will sputter material from the target onto the substrate. This method of sputtering is highly efficient, making it ideal for low-volume production runs. The indirect-sputtering tool uses a reel-to-reel deposition chamber to sputter material from rotating target onto the substrate. This method can be used for uniform, high-quality thin-film deposition on a large-scale as the target can be replaced quickly and easily. Both services have multiple process recipes, allowing for easy customization and optimization to suit the needs. The sputtering unit also uses a control panel and software that allows the user to monitor process stability, ensuring constant and consistent wafer processing. MRC Eclipse is capable of both argon and nitrogen-based sputtering, allowing for superior material selectivity. The machine is equipped with an auto-alignment function which allows for easy and accurate positioning of the target and substrate in the sputtering chamber. In addition, TEL Eclipse is compatible with a range of optional modules, such as reactive sputtering, ion source, and electrostatic chuck. This allows greater flexibility and precision to compete with the demands of various process requirements. The tool also offers a fully automated wafer handling asset, designed to increase productivity and reduce fatigue. This model allows for pre-programmed sputtering procedures, and runs without the need for manual intervention. By combining the latest sputtering technology with intuitive software, Eclipse provides a reliable and efficient sputtering equipment that can meet the needs of various processes. With advanced features such as low-volume production, precision alignment, and automated wafer handling, TOKYO ELECTRON Eclipse is an ideal sputtering option for industry professionals.