Used AIRCO TEMESCAL BJD-1800 #9212518 for sale
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ID: 9212518
Vintage: 2009
Sputter system
(3) Cathodes:
(2) Cathodes: Configured for RF MAGNETRON co-sputtering
Cathode: Configured for DC MAGNETRON sputtering
Load lock consists:
Gate valve
Adapter flange
Motorized linear motion assembly
Diameter stainless steel process chamber, 18”
Lower source tray swings out for maintenance
Rotating substrate table:
Diameter: 7.5”
RF Biasing capability: 300-Watt
Rotate: 5 RPM-100 RPM
Process chamber:
Fully shielded and shielding is flame sprayed
Pumped with ALCATEL 5900 Turbo molecular pump (880 l/s)
Servo motor controlled throttle valve
(3) ANGSTROM SCIENCES MAGNETRON Cathodes: 2” Diameter
Independent shutter system
ADVANCED ENERGY MDX DC Sputtering power supply: 1kW
(2) ADVANCED ENERGY 600 Watt RF Generators
Automatic impedance matching networks for magnetron cathode sputtering
ADVANCED ENERGY 300 Watt RF Generator
Automatic impedance matching networks for biasing substrate
(3) MFC (Mass flow controls)
Process gas plumbing: UHP Stainless steel
VCR Fittings throughout
Electro-polished
Orbitally welded
Fully leak tested
Full-scale capacitance manometer: 1 Torr
Automatic isolation valve to prevent venting of manometer
LEYBOLD D-30 20.9 CFM Mechanical pump
System base pressure: Better than 1x10-7 torr
Materials: Ti, Cr, W, Ge, Si, Fe, MoS2, ITO, Ag, Nb, Cu, SiN, TiN, Al
Documentation
2009 vintage.
AIRCO TEMESCAL BJD-1800 evaporator is an efficient, high-performance device designed to improve air quality and temperature regulation in commercial and industrial applications. This evaporator utilizes a three-stage process to provide reliably precise temperature, humidity and indoor air quality control, while reducing power input and operational costs. Working with a combination of fresh air and drainage air, the evaporator first draws air into its self-contained enclosure where it is heated, then drawn into the heat exchanger section. Here, the heated air is further heated by a gas or electric heating element before undergoing a cooling process within the evaporator. This cooled air is then returned to the interior environment. The final stage of AIRCO TEMESCAL BJD 1800's evaporator process employs a fan and a high efficiency cooling coil to reduce the temperature further. The fan draws even colder air into the cooling coil, wherein the high-heat energy is removed from the cooled air and is then discharged outside. The robust design and construction of BJD-1800 ensures a minimum of 15-20 air changes per hour, providing consistent indoor air quality throughout the day. Operational efficiency is also enhanced by BJD 1800's removable access panels and self-contained refrigerant piping systems that help remove the need for expensive labour downtime and costly installations. The TEMESCAL AIRCO TEMESCAL BJD-1800 evaporator utilizes energy efficient components to reduce electricity consumption and operating costs. This makes it an attractive option for commercial, industrial and manufacturing businesses seeking an economical alternative to traditional cooling systems. With its robust construction and advanced features, AIRCO TEMESCAL BJD 1800 evaporator is an ideal solution for improving air quality and temperature regulation in a wide range of indoor environments.
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