Used CANON / ANELVA APT 5800 #9158870 for sale

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CANON / ANELVA APT 5800
Sold
Manufacturer
CANON / ANELVA
Model
APT 5800
ID: 9158870
PVD Systems, 8" BPSG.
CANON / ANELVA APT 5800 is a high-precision, multi-functional electron beam processing reactor designed for a wide range of applications, such as deposition, etching, and coating. This high-performance equipment is the perfect solution for a variety of industries including electronics, optics, semiconductor, and medical where precise processing is needed. CANON APT 5800 features a state-of-the-art electron beam gun with a six-axis control system that produces high beam uniformity, low beam divergence, and excellent beam control. This remarkable unit also includes a vented heated bellows, which eliminates particle contamination while maintaining excellent beam uniformity. Its high-resolution Quick Change Beam Square Machine provides a user-friendly interface for fast and accurate beam alignment and uniformity. ANELVA APT 5800 is capable of processing up to four different targets simultaneously, making it highly efficient. It is also equipped with an advanced automatic current compensation feature to ensure uniformity across all target positions. APT 5800 is outfitted with an Electro-Static Precise Slide Tool (ESP) with the ability to precisely tilt and rotate the electron beam gun and targets in order to provide superior processing capabilities. This allows for multi-directional processing to be completed in a single run with minimal changeover time. CANON / ANELVA APT 5800 also offers a variety of process control functions, such as Temperature Control, Faraday Cup Monitor, and Process Timing Control, which makes it easy to precisely monitor and control all stages of the process. The reactor is complemented by a variety of ancillary components, such as a Target Positioning Unit (TPU), Vacuum Leak Detector (VLD), and Load Lock Asset (LLS), which are designed to ensure a consistent and predictable process. CANON APT 5800 is a reliable and robust reactor that produces excellent results and can be used in various industrial settings. This model provides remarkable accuracy, precision, and throughput, making it a great choice for anyone looking for an all-in-one solution for their processing needs.
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