Used CANON / ANELVA APT 5800 #9158872 for sale

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CANON / ANELVA APT 5800
Sold
Manufacturer
CANON / ANELVA
Model
APT 5800
ID: 9158872
Wafer Size: 8"
PVD Systems, 8" NSG.
CANON / ANELVA APT 5800 is a reactor developed by CANON Corporation as an advanced processing tool for a wide variety of materials. This industrial-grade tool has been designed for use in high-pressure, high-temperature processing applications such as microelectronics, optoelectronics, and medical electronics. It is also used in a variety of other industrial and research applications such as plasma deposition, sputter deposition, and carbon nanotube deposition. CANON APT 5800 utilizes a patented, three-dimensional (3D) thermal spreading equipment that is capable of precise temperature control with a high degree of accuracy. This system renders ANELVA APT 5800 as a powerful tool for a range of different applications. In addition, this reactor also features a high-powered gas distribution unit, along with a five-zone temperature control machine that can precisely control temperatures up to 11,600°C. The three-dimensional thermal spreading tool helps to ensure consistent results when applying heat to materials. With this asset, temperatures remain concentrated in highly specific areas of the wafer, resulting in more accurate and uniform results. Additionally, APT 5800 has been designed with advanced technology to minimize any significant heating impacts on adjacent components and devices, while keeping process temperatures precisely controlled. This ensures that high-quality products are achieved in a wide range of applications. Furthermore, the reactor utilizes a showerhead-type gas diffuser that enables precise and uniform gas distribution. This feature offers improved results, such as increased process stability along with improved material adhesion and control. CANON / ANELVA APT 5800 also features an integral ladder buffer that is designed for installation flush to the gas diffusion plate; this design allows for a larger reaction chamber, providing greater capacity for larger applications. In conclusion, CANON APT 5800 is a powerful reactor that can be used for a variety of high-temperature processing applications. It is designed for precise control with a high degree of accuracy and features advanced technological components to ensure high-quality results. This reactor is the perfect tool for any application that requires precise temperature control in a high-pressure, high-temperature environment.
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