Used CANON / ANELVA E-402S #9188024 for sale

CANON / ANELVA E-402S is an advanced sputtering equipment for the deposition of thin films on various substrates. It offers advanced features and solid performance that makes it well suited for use in the production of high-performance electronic devices. CANON E-402S utilizes a four-pieces of planar magnetron sputtering heads for a uniform film deposition. It also has an auto sputter height adjuster for easy handling and accuracy. The system is also equipped with capability of dual voltage pulse power for a precise film control with sharp sputtering rate and profile control. ANELVA E-402S has a high vacuum chamber constructed with stainless steel. It also has a based power supply, independent turbine vacuum unit, and a Vacuum Interlock Machine for total safety control. It offers a range of options for ultrasonic cleaning and a 25-stage substrate heater for an excellent temperature control. The tool has maximum typical process temperatures of up to 380°C with temperature monitoring, RF/DC small sputtering, deflection correction, high-speed processes, and Ultra High Vacuum (UHV) of 10⁻⁴ mbar. It also has an auto-chamber clean asset with an advanced filtration model for a thorough chamber cleaning. E-402S is a reliable and robust equipment. It has a number of features that make it well-suited for the manufacture of superior electronic components. It allows for the precise monitoring of a wide range of parameters and offers a variety of process capabilities that are essential to manufacturing high-performance components.