Used CANON / ANELVA I-1060 SVII Plus 1 #9273917 for sale

CANON / ANELVA I-1060 SVII Plus 1 is a sputtering equipment that is capable of depositing thin films onto substrates. It is typically used for the deposition of hard, conductive, and dielectric films for a wide range of applications. CANON I-1060SVII PLUS-1 has high throughput and is highly efficient. It offers a high precision, high accuracy, and superior mechanical properties with a wide variety of materials, and is capable of applying very thin layers of coatings with tight control of the film thickness. ANELVA I-1060 SVII PLUS-1 has a primary magnetron sputter source with a maximum sputter rate of up to 100 nm/min in the standard testing environment. Its vertical working area provides a large area of sputter deposition of up to 32" x 18". The sputter source is powered by a 6 KW power supply that delivers a uniform targeted ion energy. The sputter source is equipped with a 15"diameter cathode target with a maximum sputter rate of 132 nm/min. It also has a programmable rotating substrate holder with 135°C capability. ANELVA I-1060SVII PLUS-1 has an installed vacuum pumps of turbomolecular and roughing pumps, and a digital vacuum gauge which enable a rapid evacuation of the chamber to a low ultimate pressure. It has an Auto Pressure Control (APC) system which lowers substrate heating time and increases the uniformity of substrates with a wide range of thickness. Furthermore, the unit also features a helium leak check machine, which allows for direct measurement of small leaks from the sputter source. In addition, the tool is also designed with an X and Y raster motion asset. This affects the substrate movements resulting in a uniform sputter deposition on the entire substrate as well as reduced surface roughness with enhanced adhesion. Moreover, an active plasma monitor helps to optimize the sputter rate with the correct degree of ionized gas for smooth and uniform coatings. CANON / ANELVA I-1060SVII PLUS-1 is a fully computer controlled model which can be used with user friendly software for easy operation. It has a data storage settings for rapid setup and provides process control overview and data logging. The equipment is frequently used for a variety of applications such as hard coating on plastics, semiconductor deposition, and thin film deposition for thin film solar cells, TFT and LCD display, and LED lighting.